Fa'amatalaga | LMT-XY-200X200 | ABVT-Z20(Ea ave afi) |
Ituaiga afi | Tolu-vaega afi e leai se u'amea | leo uila afi + |
I'ugafono | Ole aofa'i numera numera 100nm | 1vpp i lalo i le 5nm |
Tu'i afi | Fa'aauau 60N/peak 210N | Fa'aauau 60N/peak 210N |
La'asaga la'ititi la'ititi[nm] | 200nm | 100nm |
Malaga [mm] | 200×200 | 10 |
Toe fai [um] | ±0.3 | |
Tulaga Sa'o [um] | ±1 | ±0.5 |
Mafolafola [um] | 10um | 5um |
Sa'o [um] | 1um | 1um |
Saosaoa maualuga [mm/s] | 500mm/s | 30mm/s |
Gafatia uta [kg] | 5kg(Z axis ma pneumatic malosi paleni paleni mamafa) |